Aerotech for precise geometric performance

THE new PlanarDLA stages include high precision roller bearings, precision machined surfaces and non-contact linear motors that drive through the axes’ center of stiffness. These features result in straightness to ±0.5µm and flatness to ±1.25µm.

The low-profile stages are designed for a wide range of applications from highly dynamic two-sided LED wafer processing to quasi-static optical metrology. There are nine models in the series to accommodate customer requirements for travel and accuracy.

Applications include:  Semiconductor manufacturing •  Electronics manufacturing (LEDs)  •  Test& Inspection   •  Laser Processing   •  Metals inspection   •  Micro-machining   •  Nanotechnology   •  Medical  •  Laboratory  •  ​Optical metrology  •  Wafer processing​  •  Metrology  • Automation

The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations, resulting in superior process yield and a low total cost of ownership. It achieves high servo bandwidths while maximizing the clear aperture available and keeping the overall height to a minimum.

Aerotech’s proprietary direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. The stages are available with one or two motors per axis allowing optimization of each axis for the specific application and process.

Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.