New ultrafast 2D metrology system from Keyence

THE IM-6500 from Keyence is a new type of measuring instrument. More than just a profile projector, a measurement microscope or an automated CNC measuring system, the IM-6500 Series image dimension measurement system is a new tool that obtains reliable measurements in a minimum of time. Simply place a target on the stage and press the button. Up to 99 points are measured in a matter of seconds with 0.5-micron accuracy. The IM-6500 eliminates tedious positioning of targets and the risk of measurements being affected by variations in operator skill levels. When edges are extracted manually with the naked eye, discrepancies between operators or due to differences in skill levels are virtually impossible to avoid. Furthermore, the longer the travel length of the XY stage, the greater the number of vibration-induced errors.

 

 Measurements are performed automatically. The Intelligent Pattern Analysis Search System (iPASS) determines the position and orientation of targets by comparing their shapes against those of recorded targets. Anything can be measured, from inside diameters, circular pitches and angles to the most complex dimensions.

 

 With an accuracy of one-hundredth of a pixel, Keyence's proprietary sub-pixel processing system detects edge positions more accurately than conventional vision systems. The IM-6500 Series offers a resolution of 6.6 million pixels, allowing repeatability of 1 micron and accuracy of between 2 and 5 microns.